UPTIMUM
UPTIMUM – Burn/Wet Technology for the safe and efficient treatment of CVD process gases
UPTIMUM is a leading technology for waste gas combustion with a simultaneous cleaning of the remaining materials. The system can treat up to 500 slm of waste gases from CVD processes, which are fed into the combined burner-scrubber system via a maximum of four separate waste gas inlets. Unlike the ESCAPE technology, the gases are burnt from top to bottom. A liquid film on the inside wall of the reactor prevents corrosion and the sedimentation of solid particles. Soluble components are absorbed and particles suspended in the scrubbing column, which is located parallel to the reactor. Deposition gases such as SiH4, NH3 etc. and chamber cleaning gases such as NF3, F2 or SF6, can be safely and efficiently disposed of by UPTIMUM.
The system is characterised by a high availability and treatment efficiency, minimum service work, a small footprint, network compatibility and low acquisition costs.
Various fuel gases can be used.
Brochure: DAS UPTIMUM (PDF, 800 KB)
Specifications
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Optimized for CVD processes
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Long PM cycles / high uptime
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Large diameter of waste gas inlets
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No inlet clogging
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Low pressure drop
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Small footprint
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Low exhaust gas temperature
Technical Data
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W 1500 mm x D 1000 mm x H 2100 mm
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Maximum waste gas flow: 500 slm
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Up to four DN 40 heated waste gas inlets (max. 200 °C)
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Fuel gas CH4, LPG (LNG, CNG) / oxidant O2, compressed air
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Communication with process tool required
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Can be connected to monitoring system
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3 x 400V / 3 x 208V
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