Monitoring
MONITORING has been developed to manage waste gas abatement equipment in critical semiconductor manufacturing processes. Key requirements include equipment monitoring, performance enhancement and improvements to the maintenance logistics. MONITORING automatically records the operating states and process parameters of the ESCAPE units, as well as the central lye supply system. All information is stored in a data bank. The advantages of MONITORING include:
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central monitoring of abatement systems like ESCAPE of the entire fab installation of abatement equipment
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recording of all process parameters, operating states, warning and error messages
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visualisation of recorded information for effective supervising of all connected unit
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generation of messages for selected events and retention of message history
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automatic determination of equipment performance (MTBF, MTTR, up-time)
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media consumption data for each abatement unit enabling easy CoO calculation
MONITORING utilises an industrial PC as a server to provide data acquisition via a BUS – system local area network. A modem installed on the server enables remote access to the entire installed base on a particular fab site. The software installed on the server allows the visualization of a historical data in the data base. A graphical user interface ensures ease of operation. All graphs can be shown on the screen or printed out.
