GIANT
GIANT is specially designed for the abatement of up to 800 slm waste gas fows from CVD processes. It is a combined burner-scrubber system.
Deposition gases such as SiH4, NH3, ect. as well as chamber clean gases like NF3 or F2 can be treated safely and efficiently.
Brochure: DAS GIANT (PDF, 830 KB)
Operation Principle
The waste gas is fed from top into a combustion reactor chamber. The toxic and pyrophoric compounds are decomposed by chemical reaction, like oxidation, reduction and pyrolysis. A fluid wall prevents corrosion and deposition of particles in the reactor.
The combustion exhaust is then flowing into a large volume wet scrubber, where soluble compounds are absorbed and particles are taken into suspension. Lye is added to the liquid to neutralize acidic compounds.
Maximum Process Gas Flows
|
Process Gas |
Maximum Flow |
Efficiency (DRE) |
|
SiH4 |
5slm |
≥99% |
|
NH3 |
40slm |
≥99% |
|
H2 |
300slm |
≥99% |
|
PH3/H2 |
5slm |
≥99% |
|
NF3 |
5slm |
≥98% |
|
HCl |
40slm |
≥99% |
|
Cl2 |
40slm |
≥99% |
|
Total Flow |
800slm |
GIANT can the treat waste gas of CVD-tools with up to 5 independant waste gas inlets.
Technical Description
Waste gas connections:
1, 4 or 5 separate waste gas inlets with 3-way ball valve (on top).
1inlet DN40; 4-5 inlets DN25.
Size:d×w×h: 1500×2000×2010mm (approx.)
Access (maintenance area) necessary on front and left side.
Advantages
•efficient treatment of combustible gas, acid and particles combined in one system
•cool exhaust gas
•all solid particles suspended in liquid (no dry dust handling)
•reduced exhaust size/flow requirements
•high safety standards (all critical parameters sensor monitored)
•interface to production system
•experienced partner with local representation: DAS
•optional electrostatic dust collector available
