GIANT (burn/wet)
GIANT-800
GIANT-800 is specially designed for the abatement of up to 800 slm waste gas fows from CVD processes. It is a combined burner-scrubber system.
Deposition gases such as SiH4, NH3, ect. as well as chamber clean gases like NF3 or F2 can be treated safely and efficiently.
Brochure: DAS GIANT (PDF, 830 KB)
