ESCAPETWIN®
The solution for waste gas treatment for all hazardous and PFC process gases in the semiconductor industry, e.g. SiH4, TEOS, BCl3, CF4, C2F6, F2, SF6, Cl2, NH3, WF6, NF3, PH3, HBr, etc.
The Burning/Scrubbing Technology is one of the most effective technologies for waste gas abatement, with lowest Cost-of-Ownership. Therefore, this technology is the heart of our ESCAPE product line.
If the user requests an uptime of 100% for waste gas abatement systems our ESCAPETWIN is the perfect solution. The TWIN includes a second totally independent ESCAPE system for back-up within one cabinet. Both systems are connected via a ball valve, which in case of maintenance or a failure of the main system automatically switches to the back-up system. The two independently operating burning/scrubbing Systems are based on the well proven ESCAPEINLINE® system. Variuos fuel gases can be used. Service is easily and quickly done without the need for special tools.
Brochure: DAS ESCAPE
ESCAPETWIN® Features
- main reactor with up to 4 independent inlets,
backup reactor with up to 4 corresponding
backup lines
- high uptime and reliability through independent
backup reactor, uninterrupted operation
during maintenance possible
- various fuel gases possible
- low water consumption through closed-loop design
- PLC controlled, network capability
- SEMI S2 compliant
Technical Data:
- dimensions (W x D x H) : 1325 mm x 775 mm x 2070 mm
- gas entry : max. 4 x KF25 or KF 40
- gas outlet: DN100
- max. gas flows: 18 m3/h
Required utilities:
- electrical: 400V AC, 3 phase/ (alternatively 208V AC, 3 phase)
- natural gas (technical quality)/ 20 - 1800 mbar/ (LPG/Hydrogen possible)
- oxygen (technical quality)/ 4 - 6 bar/ (CDA possible for special application)
- make-up water/ 3 - 6 bar
- potassium hydroxide (50 %)/ 1-2 bar/ (alternatively sodium hydroxide 50%)
- CDA (technical quality)/ 5 - 7 bar
- nitrogen / 3 - 6 bar
- cooling water/ 3 - 6 bar, 3 bar I/O pressure difference
ESCAPETWIN®
ESCAPETWIN® System Dimensions
