ESCAPE (burn/wet)
Technology
The waste gas from the process tool is fed into the center of a burner, and thermal decomposition of the waste gases occurs in the flame.
Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis).
In the subsequent scrubbing process, the gaseous and solid compounds generated in the burning process are bound by a suitable liquid.
When abating waste products sensitive to hydrolysis or oxidation, the Nitrogen-Purge-System (NPS) is installed and lines and valves are heated. Typical examples are Boron Trichloride, Tungsten Hexafluoride and Silane, which react with airborne humidity or oxygen and form deposits, which can cause clogging in lines and fittings.
ESCAPEINLINE®
The Burning/Scrubbing Technology is one of the most effective technologies for waste gas abatement, with lowest Cost-of-Ownership, on a worldwide basis. Therefore, this technology is the heart of our ESCAPE product line.
The ESCAPEINLINE® is our well proven basic system, meeting the abatement requirements of processes in semiconductor industry.
The unit combines numerous advantages, such as high abatement efficiencies, low cost of ownership, small footprint and networking ability. Various fuel gases can be utilized.
ESCAPE systems can be placed side-by-side as only front and rear access is required for maintenance. Service is easily and quickly done without the need for special tools.
Brochure: DAS ESCAPE (PDF, 970 KB)
ESCAPETWIN®
The solution for waste gas treatment for all hazardous and PFC process gases in the semiconductor industry, e.g. SiH4, TEOS, BCl3, CF4, C2F6, F2, SF6, Cl2, NH3, WF6, NF3, PH3, HBr, etc.
The Burning/Scrubbing Technology is one of the most effective technologies for waste gas abatement, with lowest Cost-of-Ownership. Therefore, this technology is the heart of our ESCAPE product line.
If the user requests an uptime of 100% for waste gas abatement systems our ESCAPETWIN is the perfect solution. The TWIN includes a second totally independent ESCAPE system for back-up within one cabinet. Both systems are connected via a ball valve, which in case of maintenance or a failure of the main system automatically switches to the back-up system. The two independently operating burning/scrubbing Systems are based on the well proven ESCAPEINLINE® system. Variuos fuel gases can be used. Service is easily and quickly done without the need for special tools.
Brochure: DAS ESCAPE
ESCAPEDUO
If a high abatement reliability in combination with a small foot print and a maximum of total gas flow is required, the ESCAPEDUO is the ideal solution.
ESCAPEDUO is a double reactor system, where both reactors treat waste gas simultaneously. In case of malfunction on one reactor, the other can take over the treatment of all waste gas channels.
The advantages are:
- Near 100% uptime through two-way backup function
- Second reactor allows uninterrupted operation during maintenance
- double amount of the total flow compared with a single reactor system
Brochure: DAS ESCAPE (PDF, 970 KB)
