AQUABATEEPI
EPI stands for epitaxy. These scrubbers are developed especially for abatement of epitaxy processes. Special care was given to the high safety standard in respect to the hydrogen carrier gas. After scrubbing, the hydrogen is diluted in controlled way below LEL.
Brochure: DAS AQUABATE (PDF, 860 KB)
Epitaxy Reduced + Atmospheric
- long maintenance intervalls, also at high TCS flows
- low dust emission
- high efficiency
- very high safety standard
- sophisticated safety concept
- low footprint
- easy to maintain
- maintenance free, magnet coupled rotary pump
- optimal use of scrubbing liquid
- maintenance free, clogging proof spray nozzles
- no packing, maintenance free absorption column
- permanently vented cabinet enclosure
- double demister systems with automatic cleaning function
- pressurised drain optionally available
- optional chemical dosage
- optional network compatibility
- optional process pressure contro
Technical data
- dimensions: 1800mm x 1200mm x 900mm ( H x W x D )
- energy: 2,7kW / 3x400V
- fresh water*: 140 litres / h
- waste water*: 140 litres / h
- nitrogen*: 120 litres / min
- gas inlets: max. 3 x KF40
- gas outlet: DN50
- max gas flow*: 36 m³ / h
- control: OMRON PLC
* process dependant
AQUABATEEPI
Applications
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Epitaxy RP + AP |
DCS, SiH4, TCS, B2H6, PH3, AsH3, HCl |
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SiGe - Epitaxy* |
SiH4, GeH4, HCl |
* often in combination with ESCAPE-Technology or dry cartridge absorber
Options
- Process pressure control for critical processes, which need good pressure stability
- Heat exchanger for lower water consumption at high concentration of lye
- Chemical dosage e.g. lye for higher efficiency for certain gases
- pH measurement for controlled chemical dosage
- Heated gas inlets for critical gases
-Network compatibility for monitoring of multiple scrubbers (pressures, levels, states, alarm list) only for OMRON PLC
- Pressurised drain for pumping of the used washing liquid into waste water drain at a higher level
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