AQUABATE  

AQUABATE is our wet treatment technology to abate waste gases efficiently, safely and nearly maintenance free. The wet scrubbers are offered for different processes.

Brochure: DAS AQUABATE (PDF, 860 KB)

Standard POU Applications 

- heated lines to the scrubber are possible
- up to 3 separate heatable waste gas inlets with anti-clogging protection
- DRE >99% for washable gases
- enhancement of efficiency by optional chemical dosage possible
- good accessibility of inlets and instruments
- controlled drip pan
- pressure sensors at all inlets
- monitoring of all functions by PLC
- run dry safe immersion pump
- optimal usage of washing liquid
- maintenance-free clogging-proof spray nozzles
- no packing, maintenance-free absorption column
- cabinet enclosure optionally available
- automatic demister rinsing optionally available
- pressurised drain optionally available
- network compatibility optionally

Technical data 

dimensions:

1500mm x 700mm x 800mm ( H x W x D )

energy:

1,55kW / 3x400V

fresh water:

160 liter / h

waste water:

160 liter / h

nitrogen:

120 liter / min

gas inlets:

max. 3 x KF40

gas outlet:

DN50

max. gas flow:

24 m³ / h

control:

OMRON-SPS

AQUABATE

Applications 

dry etch

BCl3, HBr, SiF4, Cl2, by-products

CVD

DCS, NH3, SiH4, clean step by-products

WCVD

WF6, SiH4, clean step by-products

LPCVD

DCS, SiH4, NH3, PH3

Options 

-

cabinet enclosure
for permanent ventilation of all gas containing parts of the system

-

heat exchanger
for lower water consumption

-

chemical dosage
e.g. lye for higher efficiency for certain gases

-

ph-measurement
for controlled chemical dosage

-

analogue pressure sensors at gas inlets
better monitoring of the gas inlets

-

heated gas inlets
for critical gases

-

Network compatibility
for monitoring of multiple scrubbers (pressures, levels, states, alarm list) only for OMRON PLC

-

automatic bypass
automatic switching before the scrubber by 3-way valve in case of failure or maintenance

-

pressurised drain
for pumping of the used washing liquid into waste water drain at a higher level

Please click here for Product Inquiry

Datenschutzerklärung | Impressum

 

Counter