废气处理
产品询问Escape (燃烧/湿洗)
The Burning/Scrubbing Technology is one of the most effective technologies for waste gas abatement, with lowest Cost-of-Ownership, on a worldwide basis.
Brochure:
DAS ESCAPE
(PDF, 970 KB)
GIANT (燃烧/湿洗)
GIANT is a combined burner-scrubber system for higher waste gas flows. Deposition gases such as SiH4, NH3, ect. as well as chamber clean gases like NF3 or F2 can be treated safely and efficiently.
Brochure: DAS GIANT (PDF, 830 KB)
AQUABATE
AQUABATE is our wet treatment technology to abate waste gases efficiently, safely and nearly maintenance free. The wet scrubbers are offered for different processes.
Brochure: DAS AQUABATE (PDF, 860 KB)
监控系统
ESCAPE NET® 系统主要用于管理在关键半导体生产工艺中的废气处理设备，其主要功能包括：设备监控，性能优化及后勤维护。ESCAPE NET®能够自动记录ESCAPE设备的操作状态、工艺参数和中央碱液供应系统，并将所有信息存储于一个数据库中。 ESCAPE NET® 的优点包括：
