DAS honored with SEMI award at Semicon Munich 2005
Munich, Germany, 12 April 2005 – Horst Reichardt, a pioneer in waste gas abatement technology for the semiconductor industry, was honored with the European SEMI Award for 2005. The award was presented during a reception at the SEMICON Europa 2005 exposition.
"Dr. Reichhardt really introduced the idea of point-of-use abatement. Today, this technology is used by most device makers around the world to ensure a high level of safety in the fab environment,” said Walter Roessger, president of SEMI Europe.
